5/16/2010	8:53:08 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/16/2010	8:53:08 AM	Recipe started at 8:53 AM
5/16/2010	8:53:08 AM	H2 valve closed
5/16/2010	8:53:08 AM	BCl3 valve closed
5/16/2010	8:53:08 AM	PH3 valve closed
5/16/2010	8:53:08 AM	SiCl4 pre valve closed
5/16/2010	8:53:08 AM	SiCl4 post valve closed
5/16/2010	8:53:08 AM	Main Vac valve closed
5/16/2010	8:53:08 AM	Bypass valve closed
5/16/2010	8:53:08 AM	Bubbler valve closed
5/16/2010	8:53:08 AM	Helium valve opened
5/16/2010	8:53:08 AM	Helium MFC set to  500.000000
5/16/2010	8:53:08 AM	H2 MFC set to  0.000000
5/16/2010	8:53:08 AM	BCl3 MFC set to  0.000000
5/16/2010	8:53:08 AM	SiCl4 MFC set to  0.000000
5/16/2010	8:53:08 AM	Bypass solenoid MFC set to  0.000000
5/16/2010	8:53:08 AM	Tube furnace set to 0
5/16/2010	8:54:30 AM	Helium valve closed
5/16/2010	8:54:30 AM	H2 valve closed
5/16/2010	8:54:30 AM	BCl3 valve closed
5/16/2010	8:54:30 AM	PH3 valve closed
5/16/2010	8:54:30 AM	SiCl4 pre valve closed
5/16/2010	8:54:30 AM	SiCl4 post valve closed
5/16/2010	8:54:30 AM	Main Vac valve closed
5/16/2010	8:54:30 AM	Bypass valve closed
5/16/2010	8:54:30 AM	Bubbler valve closed
5/16/2010	8:54:30 AM	Helium MFC set to  0.000000
5/16/2010	8:54:30 AM	H2 MFC set to  0.000000
5/16/2010	8:54:30 AM	BCl3 MFC set to  0.000000
5/16/2010	8:54:30 AM	SiCl4 MFC set to  0.000000
5/16/2010	8:54:30 AM	Bypass solenoid MFC set to  0.000000
5/16/2010	8:54:30 AM	Tube furnace set to 0
5/16/2010	8:54:30 AM	Run finished at 8:54 AM
5/16/2010	8:54:30 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/16/2010	9:04:49 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/16/2010	9:04:49 AM	Recipe started at 9:04 AM
5/16/2010	9:04:49 AM	Helium valve closed
5/16/2010	9:04:49 AM	H2 valve closed
5/16/2010	9:04:49 AM	BCl3 valve closed
5/16/2010	9:04:49 AM	PH3 valve closed
5/16/2010	9:04:49 AM	SiCl4 pre valve closed
5/16/2010	9:04:49 AM	SiCl4 post valve closed
5/16/2010	9:04:49 AM	Main Vac valve closed
5/16/2010	9:04:49 AM	Bubbler valve closed
5/16/2010	9:04:50 AM	Bypass valve opened
5/16/2010	9:04:50 AM	Helium MFC set to  0.000000
5/16/2010	9:04:50 AM	H2 MFC set to  0.000000
5/16/2010	9:04:50 AM	BCl3 MFC set to  0.000000
5/16/2010	9:04:50 AM	SiCl4 MFC set to  0.000000
5/16/2010	9:04:50 AM	Bypass solenoid MFC set to  0.000000
5/16/2010	9:04:50 AM	Tube furnace set to 0
5/16/2010	9:05:36 AM	Helium valve closed
5/16/2010	9:05:36 AM	H2 valve closed
5/16/2010	9:05:36 AM	BCl3 valve closed
5/16/2010	9:05:36 AM	PH3 valve closed
5/16/2010	9:05:36 AM	SiCl4 pre valve closed
5/16/2010	9:05:36 AM	SiCl4 post valve closed
5/16/2010	9:05:36 AM	Bubbler valve closed
5/16/2010	9:05:36 AM	Main Vac valve opened
5/16/2010	9:05:36 AM	Bypass valve opened
5/16/2010	9:05:36 AM	Helium MFC set to  0.000000
5/16/2010	9:05:36 AM	H2 MFC set to  0.000000
5/16/2010	9:05:36 AM	BCl3 MFC set to  0.000000
5/16/2010	9:05:36 AM	SiCl4 MFC set to  0.000000
5/16/2010	9:05:36 AM	Bypass solenoid MFC set to  0.000000
5/16/2010	9:05:37 AM	Tube furnace set to 0
5/16/2010	9:05:37 AM	Run finished at 9:05 AM
5/16/2010	9:05:37 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/16/2010	9:05:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/16/2010	9:06:05 AM	Recipe started at 9:06 AM
5/16/2010	9:06:05 AM	H2 valve closed
5/16/2010	9:06:05 AM	BCl3 valve closed
5/16/2010	9:06:05 AM	PH3 valve closed
5/16/2010	9:06:05 AM	SiCl4 pre valve closed
5/16/2010	9:06:05 AM	SiCl4 post valve closed
5/16/2010	9:06:05 AM	Main Vac valve closed
5/16/2010	9:06:05 AM	Bypass valve closed
5/16/2010	9:06:05 AM	Bubbler valve closed
5/16/2010	9:06:05 AM	Helium valve opened
5/16/2010	9:06:05 AM	Helium MFC set to  500.000000
5/16/2010	9:06:05 AM	H2 MFC set to  0.000000
5/16/2010	9:06:05 AM	BCl3 MFC set to  0.000000
5/16/2010	9:06:05 AM	SiCl4 MFC set to  0.000000
5/16/2010	9:06:05 AM	Bypass solenoid MFC set to  0.000000
5/16/2010	9:06:05 AM	Tube furnace set to 0
5/16/2010	9:07:28 AM	Helium valve closed
5/16/2010	9:07:28 AM	H2 valve closed
5/16/2010	9:07:28 AM	BCl3 valve closed
5/16/2010	9:07:28 AM	PH3 valve closed
5/16/2010	9:07:28 AM	SiCl4 pre valve closed
5/16/2010	9:07:28 AM	SiCl4 post valve closed
5/16/2010	9:07:28 AM	Main Vac valve closed
5/16/2010	9:07:28 AM	Bypass valve closed
5/16/2010	9:07:28 AM	Bubbler valve closed
5/16/2010	9:07:28 AM	Helium MFC set to  0.000000
5/16/2010	9:07:28 AM	H2 MFC set to  0.000000
5/16/2010	9:07:28 AM	BCl3 MFC set to  0.000000
5/16/2010	9:07:28 AM	SiCl4 MFC set to  0.000000
5/16/2010	9:07:28 AM	Bypass solenoid MFC set to  0.000000
5/16/2010	9:07:29 AM	Tube furnace set to 0
5/16/2010	9:07:44 AM	Helium valve closed
5/16/2010	9:07:44 AM	H2 valve closed
5/16/2010	9:07:44 AM	BCl3 valve closed
5/16/2010	9:07:44 AM	PH3 valve closed
5/16/2010	9:07:44 AM	SiCl4 pre valve closed
5/16/2010	9:07:44 AM	SiCl4 post valve closed
5/16/2010	9:07:44 AM	Main Vac valve closed
5/16/2010	9:07:44 AM	Bubbler valve closed
5/16/2010	9:07:44 AM	Bypass valve opened
5/16/2010	9:07:44 AM	Helium MFC set to  0.000000
5/16/2010	9:07:44 AM	H2 MFC set to  0.000000
5/16/2010	9:07:44 AM	BCl3 MFC set to  0.000000
5/16/2010	9:07:44 AM	SiCl4 MFC set to  0.000000
5/16/2010	9:07:44 AM	Bypass solenoid MFC set to  0.000000
5/16/2010	9:07:44 AM	Tube furnace set to 0
5/16/2010	9:08:17 AM	Helium valve closed
5/16/2010	9:08:17 AM	H2 valve closed
5/16/2010	9:08:17 AM	BCl3 valve closed
5/16/2010	9:08:17 AM	PH3 valve closed
5/16/2010	9:08:17 AM	SiCl4 pre valve closed
5/16/2010	9:08:17 AM	SiCl4 post valve closed
5/16/2010	9:08:17 AM	Bubbler valve closed
5/16/2010	9:08:17 AM	Main Vac valve opened
5/16/2010	9:08:17 AM	Bypass valve opened
5/16/2010	9:08:17 AM	Helium MFC set to  0.000000
5/16/2010	9:08:17 AM	H2 MFC set to  0.000000
5/16/2010	9:08:17 AM	BCl3 MFC set to  0.000000
5/16/2010	9:08:17 AM	SiCl4 MFC set to  0.000000
5/16/2010	9:08:17 AM	Bypass solenoid MFC set to  0.000000
5/16/2010	9:08:17 AM	Tube furnace set to 0
5/16/2010	9:13:17 AM	H2 valve closed
5/16/2010	9:13:17 AM	BCl3 valve closed
5/16/2010	9:13:17 AM	PH3 valve closed
5/16/2010	9:13:17 AM	SiCl4 pre valve closed
5/16/2010	9:13:17 AM	SiCl4 post valve closed
5/16/2010	9:13:17 AM	Main Vac valve closed
5/16/2010	9:13:17 AM	Bypass valve closed
5/16/2010	9:13:17 AM	Bubbler valve closed
5/16/2010	9:13:17 AM	Helium valve opened
5/16/2010	9:13:17 AM	Helium MFC set to  500.000000
5/16/2010	9:13:17 AM	H2 MFC set to  0.000000
5/16/2010	9:13:17 AM	BCl3 MFC set to  0.000000
5/16/2010	9:13:17 AM	SiCl4 MFC set to  0.000000
5/16/2010	9:13:17 AM	Bypass solenoid MFC set to  0.000000
5/16/2010	9:13:17 AM	Tube furnace set to 0
5/16/2010	9:14:40 AM	Helium valve closed
5/16/2010	9:14:40 AM	H2 valve closed
5/16/2010	9:14:40 AM	BCl3 valve closed
5/16/2010	9:14:40 AM	PH3 valve closed
5/16/2010	9:14:40 AM	SiCl4 pre valve closed
5/16/2010	9:14:40 AM	SiCl4 post valve closed
5/16/2010	9:14:40 AM	Main Vac valve closed
5/16/2010	9:14:40 AM	Bypass valve closed
5/16/2010	9:14:40 AM	Bubbler valve closed
5/16/2010	9:14:40 AM	Helium MFC set to  0.000000
5/16/2010	9:14:40 AM	H2 MFC set to  0.000000
5/16/2010	9:14:40 AM	BCl3 MFC set to  0.000000
5/16/2010	9:14:40 AM	SiCl4 MFC set to  0.000000
5/16/2010	9:14:40 AM	Bypass solenoid MFC set to  0.000000
5/16/2010	9:14:41 AM	Tube furnace set to 0
5/16/2010	9:14:56 AM	Helium valve closed
5/16/2010	9:14:56 AM	H2 valve closed
5/16/2010	9:14:56 AM	BCl3 valve closed
5/16/2010	9:14:56 AM	PH3 valve closed
5/16/2010	9:14:56 AM	SiCl4 pre valve closed
5/16/2010	9:14:56 AM	SiCl4 post valve closed
5/16/2010	9:14:56 AM	Main Vac valve closed
5/16/2010	9:14:56 AM	Bubbler valve closed
5/16/2010	9:14:56 AM	Bypass valve opened
5/16/2010	9:14:56 AM	Helium MFC set to  0.000000
5/16/2010	9:14:56 AM	H2 MFC set to  0.000000
5/16/2010	9:14:56 AM	BCl3 MFC set to  0.000000
5/16/2010	9:14:56 AM	SiCl4 MFC set to  0.000000
5/16/2010	9:14:56 AM	Bypass solenoid MFC set to  0.000000
5/16/2010	9:14:56 AM	Tube furnace set to 0
5/16/2010	9:15:29 AM	Helium valve closed
5/16/2010	9:15:29 AM	H2 valve closed
5/16/2010	9:15:29 AM	BCl3 valve closed
5/16/2010	9:15:29 AM	PH3 valve closed
5/16/2010	9:15:29 AM	SiCl4 pre valve closed
5/16/2010	9:15:29 AM	SiCl4 post valve closed
5/16/2010	9:15:29 AM	Bubbler valve closed
5/16/2010	9:15:29 AM	Main Vac valve opened
5/16/2010	9:15:29 AM	Bypass valve opened
5/16/2010	9:15:29 AM	Helium MFC set to  0.000000
5/16/2010	9:15:29 AM	H2 MFC set to  0.000000
5/16/2010	9:15:29 AM	BCl3 MFC set to  0.000000
5/16/2010	9:15:29 AM	SiCl4 MFC set to  0.000000
5/16/2010	9:15:29 AM	Bypass solenoid MFC set to  0.000000
5/16/2010	9:15:29 AM	Tube furnace set to 0
5/16/2010	9:20:29 AM	H2 valve closed
5/16/2010	9:20:29 AM	BCl3 valve closed
5/16/2010	9:20:29 AM	PH3 valve closed
5/16/2010	9:20:29 AM	SiCl4 pre valve closed
5/16/2010	9:20:29 AM	SiCl4 post valve closed
5/16/2010	9:20:29 AM	Main Vac valve closed
5/16/2010	9:20:29 AM	Bypass valve closed
5/16/2010	9:20:29 AM	Bubbler valve closed
5/16/2010	9:20:29 AM	Helium valve opened
5/16/2010	9:20:29 AM	Helium MFC set to  500.000000
5/16/2010	9:20:29 AM	H2 MFC set to  0.000000
5/16/2010	9:20:29 AM	BCl3 MFC set to  0.000000
5/16/2010	9:20:29 AM	SiCl4 MFC set to  0.000000
5/16/2010	9:20:29 AM	Bypass solenoid MFC set to  0.000000
5/16/2010	9:20:29 AM	Tube furnace set to 0
5/16/2010	9:21:52 AM	Helium valve closed
5/16/2010	9:21:52 AM	H2 valve closed
5/16/2010	9:21:52 AM	BCl3 valve closed
5/16/2010	9:21:52 AM	PH3 valve closed
5/16/2010	9:21:52 AM	SiCl4 pre valve closed
5/16/2010	9:21:52 AM	SiCl4 post valve closed
5/16/2010	9:21:52 AM	Main Vac valve closed
5/16/2010	9:21:52 AM	Bypass valve closed
5/16/2010	9:21:52 AM	Bubbler valve closed
5/16/2010	9:21:52 AM	Helium MFC set to  0.000000
5/16/2010	9:21:52 AM	H2 MFC set to  0.000000
5/16/2010	9:21:52 AM	BCl3 MFC set to  0.000000
5/16/2010	9:21:52 AM	SiCl4 MFC set to  0.000000
5/16/2010	9:21:52 AM	Bypass solenoid MFC set to  0.000000
5/16/2010	9:21:52 AM	Tube furnace set to 0
5/16/2010	9:22:07 AM	Helium valve closed
5/16/2010	9:22:07 AM	H2 valve closed
5/16/2010	9:22:07 AM	BCl3 valve closed
5/16/2010	9:22:07 AM	PH3 valve closed
5/16/2010	9:22:07 AM	SiCl4 pre valve closed
5/16/2010	9:22:07 AM	SiCl4 post valve closed
5/16/2010	9:22:07 AM	Main Vac valve closed
5/16/2010	9:22:07 AM	Bubbler valve closed
5/16/2010	9:22:07 AM	Bypass valve opened
5/16/2010	9:22:07 AM	Helium MFC set to  0.000000
5/16/2010	9:22:07 AM	H2 MFC set to  0.000000
5/16/2010	9:22:07 AM	BCl3 MFC set to  0.000000
5/16/2010	9:22:07 AM	SiCl4 MFC set to  0.000000
5/16/2010	9:22:07 AM	Bypass solenoid MFC set to  0.000000
5/16/2010	9:22:08 AM	Tube furnace set to 0
5/16/2010	9:22:41 AM	Helium valve closed
5/16/2010	9:22:41 AM	H2 valve closed
5/16/2010	9:22:41 AM	BCl3 valve closed
5/16/2010	9:22:41 AM	PH3 valve closed
5/16/2010	9:22:41 AM	SiCl4 pre valve closed
5/16/2010	9:22:41 AM	SiCl4 post valve closed
5/16/2010	9:22:41 AM	Bubbler valve closed
5/16/2010	9:22:41 AM	Main Vac valve opened
5/16/2010	9:22:41 AM	Bypass valve opened
5/16/2010	9:22:41 AM	Helium MFC set to  0.000000
5/16/2010	9:22:41 AM	H2 MFC set to  0.000000
5/16/2010	9:22:41 AM	BCl3 MFC set to  0.000000
5/16/2010	9:22:41 AM	SiCl4 MFC set to  0.000000
5/16/2010	9:22:41 AM	Bypass solenoid MFC set to  0.000000
5/16/2010	9:22:41 AM	Tube furnace set to 0
5/16/2010	9:27:41 AM	Helium valve closed
5/16/2010	9:27:41 AM	H2 valve closed
5/16/2010	9:27:41 AM	BCl3 valve closed
5/16/2010	9:27:41 AM	PH3 valve closed
5/16/2010	9:27:41 AM	SiCl4 pre valve closed
5/16/2010	9:27:41 AM	SiCl4 post valve closed
5/16/2010	9:27:41 AM	Bubbler valve closed
5/16/2010	9:27:41 AM	Main Vac valve opened
5/16/2010	9:27:41 AM	Bypass valve opened
5/16/2010	9:27:41 AM	Helium MFC set to  0.000000
5/16/2010	9:27:41 AM	H2 MFC set to  0.000000
5/16/2010	9:27:41 AM	BCl3 MFC set to  0.000000
5/16/2010	9:27:41 AM	SiCl4 MFC set to  0.000000
5/16/2010	9:27:41 AM	Bypass solenoid MFC set to  0.000000
5/16/2010	9:27:41 AM	Tube furnace set to 0
5/16/2010	9:27:42 AM	Run finished at 9:27 AM
5/16/2010	9:27:42 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/16/2010	9:30:14 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/16/2010	9:30:15 AM	Recipe started at 9:30 AM
5/16/2010	9:30:15 AM	Helium valve closed
5/16/2010	9:30:15 AM	H2 valve closed
5/16/2010	9:30:15 AM	BCl3 valve closed
5/16/2010	9:30:15 AM	PH3 valve closed
5/16/2010	9:30:15 AM	SiCl4 pre valve closed
5/16/2010	9:30:15 AM	SiCl4 post valve closed
5/16/2010	9:30:15 AM	Main Vac valve closed
5/16/2010	9:30:15 AM	Bypass valve closed
5/16/2010	9:30:15 AM	Bubbler valve closed
5/16/2010	9:30:15 AM	Helium MFC set to  0.000000
5/16/2010	9:30:15 AM	H2 MFC set to  0.000000
5/16/2010	9:30:15 AM	BCl3 MFC set to  0.000000
5/16/2010	9:30:15 AM	SiCl4 MFC set to  0.000000
5/16/2010	9:30:15 AM	Bypass solenoid MFC set to  0.000000
5/16/2010	9:30:15 AM	Tube furnace set to 0
5/16/2010	9:30:15 AM	Run finished at 9:30 AM
5/16/2010	9:30:15 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/16/2010	9:30:27 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/16/2010	9:30:27 AM	Recipe started at 9:30 AM
5/16/2010	9:30:27 AM	Helium valve closed
5/16/2010	9:30:27 AM	H2 valve closed
5/16/2010	9:30:27 AM	BCl3 valve closed
5/16/2010	9:30:27 AM	PH3 valve closed
5/16/2010	9:30:27 AM	SiCl4 pre valve closed
5/16/2010	9:30:27 AM	SiCl4 post valve closed
5/16/2010	9:30:27 AM	Main Vac valve closed
5/16/2010	9:30:27 AM	Bubbler valve closed
5/16/2010	9:30:27 AM	Bypass valve opened
5/16/2010	9:30:27 AM	Helium MFC set to  0.000000
5/16/2010	9:30:27 AM	H2 MFC set to  0.000000
5/16/2010	9:30:27 AM	BCl3 MFC set to  0.000000
5/16/2010	9:30:27 AM	SiCl4 MFC set to  0.000000
5/16/2010	9:30:27 AM	Bypass solenoid MFC set to  0.000000
5/16/2010	9:30:28 AM	Tube furnace set to 0
5/16/2010	9:30:28 AM	Helium valve closed
5/16/2010	9:30:28 AM	H2 valve closed
5/16/2010	9:30:28 AM	BCl3 valve closed
5/16/2010	9:30:28 AM	PH3 valve closed
5/16/2010	9:30:28 AM	SiCl4 pre valve closed
5/16/2010	9:30:28 AM	SiCl4 post valve closed
5/16/2010	9:30:28 AM	Bubbler valve closed
5/16/2010	9:30:28 AM	Main Vac valve opened
5/16/2010	9:30:28 AM	Bypass valve opened
5/16/2010	9:30:28 AM	Helium MFC set to  0.000000
5/16/2010	9:30:28 AM	H2 MFC set to  0.000000
5/16/2010	9:30:28 AM	BCl3 MFC set to  0.000000
5/16/2010	9:30:28 AM	SiCl4 MFC set to  0.000000
5/16/2010	9:30:28 AM	Bypass solenoid MFC set to  0.000000
5/16/2010	9:30:28 AM	Tube furnace set to 0
5/16/2010	9:30:28 AM	Run finished at 9:30 AM
5/16/2010	9:30:28 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/16/2010	9:41:30 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/16/2010	9:41:30 AM	Recipe started at 9:41 AM
5/16/2010	9:41:30 AM	Helium valve closed
5/16/2010	9:41:30 AM	H2 valve closed
5/16/2010	9:41:30 AM	BCl3 valve closed
5/16/2010	9:41:30 AM	PH3 valve closed
5/16/2010	9:41:30 AM	SiCl4 pre valve closed
5/16/2010	9:41:30 AM	SiCl4 post valve closed
5/16/2010	9:41:30 AM	Main Vac valve closed
5/16/2010	9:41:30 AM	Bypass valve closed
5/16/2010	9:41:30 AM	Bubbler valve closed
5/16/2010	9:41:30 AM	Helium MFC set to  0.000000
5/16/2010	9:41:30 AM	H2 MFC set to  0.000000
5/16/2010	9:41:30 AM	BCl3 MFC set to  0.000000
5/16/2010	9:41:30 AM	SiCl4 MFC set to  0.000000
5/16/2010	9:41:30 AM	Bypass solenoid MFC set to  0.000000
5/16/2010	9:41:30 AM	Tube furnace set to 0
5/16/2010	9:41:31 AM	Run finished at 9:41 AM
5/16/2010	9:41:31 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/16/2010	9:41:41 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/16/2010	9:41:42 AM	Recipe started at 9:41 AM
5/16/2010	9:41:42 AM	Helium valve closed
5/16/2010	9:41:42 AM	H2 valve closed
5/16/2010	9:41:42 AM	BCl3 valve closed
5/16/2010	9:41:42 AM	PH3 valve closed
5/16/2010	9:41:42 AM	SiCl4 pre valve closed
5/16/2010	9:41:42 AM	SiCl4 post valve closed
5/16/2010	9:41:42 AM	Main Vac valve closed
5/16/2010	9:41:42 AM	Bubbler valve closed
5/16/2010	9:41:42 AM	Bypass valve opened
5/16/2010	9:41:42 AM	Helium MFC set to  0.000000
5/16/2010	9:41:42 AM	H2 MFC set to  0.000000
5/16/2010	9:41:42 AM	BCl3 MFC set to  0.000000
5/16/2010	9:41:42 AM	SiCl4 MFC set to  0.000000
5/16/2010	9:41:42 AM	Bypass solenoid MFC set to  0.000000
5/16/2010	9:41:42 AM	Tube furnace set to 0
5/16/2010	9:41:42 AM	Helium valve closed
5/16/2010	9:41:42 AM	H2 valve closed
5/16/2010	9:41:42 AM	BCl3 valve closed
5/16/2010	9:41:42 AM	PH3 valve closed
5/16/2010	9:41:42 AM	SiCl4 pre valve closed
5/16/2010	9:41:42 AM	SiCl4 post valve closed
5/16/2010	9:41:42 AM	Bubbler valve closed
5/16/2010	9:41:42 AM	Main Vac valve opened
5/16/2010	9:41:42 AM	Bypass valve opened
5/16/2010	9:41:42 AM	Helium MFC set to  0.000000
5/16/2010	9:41:42 AM	H2 MFC set to  0.000000
5/16/2010	9:41:42 AM	BCl3 MFC set to  0.000000
5/16/2010	9:41:42 AM	SiCl4 MFC set to  0.000000
5/16/2010	9:41:42 AM	Bypass solenoid MFC set to  0.000000
5/16/2010	9:41:43 AM	Tube furnace set to 0
5/16/2010	9:41:43 AM	Run finished at 9:41 AM
5/16/2010	9:41:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/16/2010	9:43:01 AM	Recipe started at 9:43 AM
5/16/2010	9:43:01 AM	Helium valve closed
5/16/2010	9:43:01 AM	BCl3 valve closed
5/16/2010	9:43:01 AM	PH3 valve closed
5/16/2010	9:43:01 AM	SiCl4 pre valve closed
5/16/2010	9:43:01 AM	SiCl4 post valve closed
5/16/2010	9:43:01 AM	Main Vac valve closed
5/16/2010	9:43:01 AM	Bypass valve closed
5/16/2010	9:43:01 AM	Bubbler valve closed
5/16/2010	9:43:01 AM	H2 valve opened
5/16/2010	9:43:01 AM	Helium MFC set to  0.000000
5/16/2010	9:43:01 AM	H2 MFC set to  500.000000
5/16/2010	9:43:01 AM	BCl3 MFC set to  0.000000
5/16/2010	9:43:01 AM	SiCl4 MFC set to  0.000000
5/16/2010	9:43:01 AM	Bypass solenoid MFC set to  0.000000
5/16/2010	9:43:01 AM	Tube furnace set to 0
5/16/2010	9:44:25 AM	Helium valve closed
5/16/2010	9:44:25 AM	BCl3 valve closed
5/16/2010	9:44:25 AM	PH3 valve closed
5/16/2010	9:44:25 AM	SiCl4 pre valve closed
5/16/2010	9:44:25 AM	SiCl4 post valve closed
5/16/2010	9:44:25 AM	Main Vac valve closed
5/16/2010	9:44:25 AM	Bypass valve closed
5/16/2010	9:44:25 AM	H2 valve opened
5/16/2010	9:44:25 AM	Bubbler valve opened
5/16/2010	9:44:25 AM	Helium MFC set to  0.000000
5/16/2010	9:44:25 AM	H2 MFC set to  500.000000
5/16/2010	9:44:25 AM	BCl3 MFC set to  0.000000
5/16/2010	9:44:25 AM	SiCl4 MFC set to  0.000000
5/16/2010	9:44:25 AM	Bypass solenoid MFC set to  0.000000
5/16/2010	9:44:25 AM	Tube furnace set to 1000
5/16/2010	10:04:25 AM	Helium valve closed
5/16/2010	10:04:25 AM	PH3 valve closed
5/16/2010	10:04:25 AM	Main Vac valve closed
5/16/2010	10:04:25 AM	Bypass valve closed
5/16/2010	10:04:25 AM	H2 valve opened
5/16/2010	10:04:25 AM	BCl3 valve opened
5/16/2010	10:04:25 AM	SiCl4 pre valve opened
5/16/2010	10:04:25 AM	SiCl4 post valve opened
5/16/2010	10:04:25 AM	Bubbler valve opened
5/16/2010	10:04:25 AM	Helium MFC set to  0.000000
5/16/2010	10:04:25 AM	H2 MFC set to  500.000000
5/16/2010	10:04:25 AM	BCl3 MFC set to  35.000000
5/16/2010	10:04:25 AM	SiCl4 MFC set to  350.000000
5/16/2010	10:04:25 AM	Bypass solenoid MFC set to  0.000000
5/16/2010	10:04:25 AM	Tube furnace set to 1000
5/16/2010	10:19:25 AM	H2 valve closed
5/16/2010	10:19:25 AM	BCl3 valve closed
5/16/2010	10:19:25 AM	PH3 valve closed
5/16/2010	10:19:25 AM	SiCl4 pre valve closed
5/16/2010	10:19:25 AM	SiCl4 post valve closed
5/16/2010	10:19:25 AM	Main Vac valve closed
5/16/2010	10:19:25 AM	Bypass valve closed
5/16/2010	10:19:25 AM	Helium valve opened
5/16/2010	10:19:25 AM	Bubbler valve opened
5/16/2010	10:19:25 AM	Helium MFC set to  500.000000
5/16/2010	10:19:25 AM	H2 MFC set to  0.000000
5/16/2010	10:19:25 AM	BCl3 MFC set to  0.000000
5/16/2010	10:19:25 AM	SiCl4 MFC set to  0.000000
5/16/2010	10:19:25 AM	Bypass solenoid MFC set to  0.000000
5/16/2010	10:19:25 AM	Tube furnace set to 0
5/16/2010	10:39:25 AM	Helium valve closed
5/16/2010	10:39:25 AM	H2 valve closed
5/16/2010	10:39:25 AM	BCl3 valve closed
5/16/2010	10:39:25 AM	PH3 valve closed
5/16/2010	10:39:25 AM	SiCl4 pre valve closed
5/16/2010	10:39:25 AM	SiCl4 post valve closed
5/16/2010	10:39:25 AM	Main Vac valve closed
5/16/2010	10:39:25 AM	Bypass valve closed
5/16/2010	10:39:25 AM	Bubbler valve closed
5/16/2010	10:39:25 AM	Helium MFC set to  0.000000
5/16/2010	10:39:25 AM	H2 MFC set to  0.000000
5/16/2010	10:39:25 AM	BCl3 MFC set to  0.000000
5/16/2010	10:39:25 AM	SiCl4 MFC set to  0.000000
5/16/2010	10:39:25 AM	Bypass solenoid MFC set to  0.000000
5/16/2010	10:39:25 AM	Tube furnace set to 0
5/16/2010	10:39:26 AM	Run finished at 10:39 AM
5/16/2010	11:06:30 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/16/2010	11:06:30 AM	Recipe started at 11:06 AM
5/16/2010	11:06:30 AM	Helium valve closed
5/16/2010	11:06:30 AM	H2 valve closed
5/16/2010	11:06:30 AM	BCl3 valve closed
5/16/2010	11:06:30 AM	PH3 valve closed
5/16/2010	11:06:30 AM	SiCl4 pre valve closed
5/16/2010	11:06:30 AM	SiCl4 post valve closed
5/16/2010	11:06:30 AM	Main Vac valve closed
5/16/2010	11:06:30 AM	Bubbler valve closed
5/16/2010	11:06:30 AM	Bypass valve opened
5/16/2010	11:06:30 AM	Helium MFC set to  0.000000
5/16/2010	11:06:30 AM	H2 MFC set to  0.000000
5/16/2010	11:06:30 AM	BCl3 MFC set to  0.000000
5/16/2010	11:06:30 AM	SiCl4 MFC set to  0.000000
5/16/2010	11:06:30 AM	Bypass solenoid MFC set to  0.000000
5/16/2010	11:06:30 AM	Tube furnace set to 0
5/16/2010	11:07:18 AM	Helium valve closed
5/16/2010	11:07:18 AM	H2 valve closed
5/16/2010	11:07:18 AM	BCl3 valve closed
5/16/2010	11:07:18 AM	PH3 valve closed
5/16/2010	11:07:18 AM	SiCl4 pre valve closed
5/16/2010	11:07:18 AM	SiCl4 post valve closed
5/16/2010	11:07:18 AM	Bubbler valve closed
5/16/2010	11:07:18 AM	Main Vac valve opened
5/16/2010	11:07:18 AM	Bypass valve opened
5/16/2010	11:07:18 AM	Helium MFC set to  0.000000
5/16/2010	11:07:18 AM	H2 MFC set to  0.000000
5/16/2010	11:07:18 AM	BCl3 MFC set to  0.000000
5/16/2010	11:07:18 AM	SiCl4 MFC set to  0.000000
5/16/2010	11:07:18 AM	Bypass solenoid MFC set to  0.000000
5/16/2010	11:07:18 AM	Tube furnace set to 0
5/16/2010	11:07:18 AM	Run finished at 11:07 AM
5/16/2010	11:07:18 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/16/2010	11:07:36 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/16/2010	11:07:42 AM	Recipe started at 11:07 AM
5/16/2010	11:07:42 AM	H2 valve closed
5/16/2010	11:07:42 AM	BCl3 valve closed
5/16/2010	11:07:42 AM	PH3 valve closed
5/16/2010	11:07:42 AM	SiCl4 pre valve closed
5/16/2010	11:07:42 AM	SiCl4 post valve closed
5/16/2010	11:07:42 AM	Main Vac valve closed
5/16/2010	11:07:42 AM	Bypass valve closed
5/16/2010	11:07:42 AM	Bubbler valve closed
5/16/2010	11:07:42 AM	Helium valve opened
5/16/2010	11:07:42 AM	Helium MFC set to  500.000000
5/16/2010	11:07:42 AM	H2 MFC set to  0.000000
5/16/2010	11:07:42 AM	BCl3 MFC set to  0.000000
5/16/2010	11:07:42 AM	SiCl4 MFC set to  0.000000
5/16/2010	11:07:42 AM	Bypass solenoid MFC set to  0.000000
5/16/2010	11:07:42 AM	Tube furnace set to 0
5/16/2010	11:09:03 AM	Helium valve closed
5/16/2010	11:09:03 AM	H2 valve closed
5/16/2010	11:09:03 AM	BCl3 valve closed
5/16/2010	11:09:03 AM	PH3 valve closed
5/16/2010	11:09:03 AM	SiCl4 pre valve closed
5/16/2010	11:09:03 AM	SiCl4 post valve closed
5/16/2010	11:09:03 AM	Main Vac valve closed
5/16/2010	11:09:03 AM	Bypass valve closed
5/16/2010	11:09:03 AM	Bubbler valve closed
5/16/2010	11:09:03 AM	Helium MFC set to  0.000000
5/16/2010	11:09:03 AM	H2 MFC set to  0.000000
5/16/2010	11:09:03 AM	BCl3 MFC set to  0.000000
5/16/2010	11:09:03 AM	SiCl4 MFC set to  0.000000
5/16/2010	11:09:03 AM	Bypass solenoid MFC set to  0.000000
5/16/2010	11:09:03 AM	Tube furnace set to 0
5/16/2010	11:09:18 AM	Helium valve closed
5/16/2010	11:09:18 AM	H2 valve closed
5/16/2010	11:09:18 AM	BCl3 valve closed
5/16/2010	11:09:18 AM	PH3 valve closed
5/16/2010	11:09:18 AM	SiCl4 pre valve closed
5/16/2010	11:09:18 AM	SiCl4 post valve closed
5/16/2010	11:09:18 AM	Main Vac valve closed
5/16/2010	11:09:18 AM	Bubbler valve closed
5/16/2010	11:09:18 AM	Bypass valve opened
5/16/2010	11:09:18 AM	Helium MFC set to  0.000000
5/16/2010	11:09:18 AM	H2 MFC set to  0.000000
5/16/2010	11:09:18 AM	BCl3 MFC set to  0.000000
5/16/2010	11:09:18 AM	SiCl4 MFC set to  0.000000
5/16/2010	11:09:18 AM	Bypass solenoid MFC set to  0.000000
5/16/2010	11:09:18 AM	Tube furnace set to 0
5/16/2010	11:09:51 AM	Helium valve closed
5/16/2010	11:09:51 AM	H2 valve closed
5/16/2010	11:09:51 AM	BCl3 valve closed
5/16/2010	11:09:51 AM	PH3 valve closed
5/16/2010	11:09:51 AM	SiCl4 pre valve closed
5/16/2010	11:09:51 AM	SiCl4 post valve closed
5/16/2010	11:09:51 AM	Bubbler valve closed
5/16/2010	11:09:51 AM	Main Vac valve opened
5/16/2010	11:09:51 AM	Bypass valve opened
5/16/2010	11:09:51 AM	Helium MFC set to  0.000000
5/16/2010	11:09:51 AM	H2 MFC set to  0.000000
5/16/2010	11:09:51 AM	BCl3 MFC set to  0.000000
5/16/2010	11:09:51 AM	SiCl4 MFC set to  0.000000
5/16/2010	11:09:51 AM	Bypass solenoid MFC set to  0.000000
5/16/2010	11:09:51 AM	Tube furnace set to 0
5/16/2010	11:14:51 AM	H2 valve closed
5/16/2010	11:14:51 AM	BCl3 valve closed
5/16/2010	11:14:51 AM	PH3 valve closed
5/16/2010	11:14:51 AM	SiCl4 pre valve closed
5/16/2010	11:14:51 AM	SiCl4 post valve closed
5/16/2010	11:14:51 AM	Main Vac valve closed
5/16/2010	11:14:51 AM	Bypass valve closed
5/16/2010	11:14:51 AM	Bubbler valve closed
5/16/2010	11:14:51 AM	Helium valve opened
5/16/2010	11:14:51 AM	Helium MFC set to  500.000000
5/16/2010	11:14:51 AM	H2 MFC set to  0.000000
5/16/2010	11:14:51 AM	BCl3 MFC set to  0.000000
5/16/2010	11:14:51 AM	SiCl4 MFC set to  0.000000
5/16/2010	11:14:51 AM	Bypass solenoid MFC set to  0.000000
5/16/2010	11:14:51 AM	Tube furnace set to 0
5/16/2010	11:16:11 AM	Helium valve closed
5/16/2010	11:16:11 AM	H2 valve closed
5/16/2010	11:16:11 AM	BCl3 valve closed
5/16/2010	11:16:11 AM	PH3 valve closed
5/16/2010	11:16:11 AM	SiCl4 pre valve closed
5/16/2010	11:16:11 AM	SiCl4 post valve closed
5/16/2010	11:16:11 AM	Main Vac valve closed
5/16/2010	11:16:11 AM	Bypass valve closed
5/16/2010	11:16:11 AM	Bubbler valve closed
5/16/2010	11:16:11 AM	Helium MFC set to  0.000000
5/16/2010	11:16:11 AM	H2 MFC set to  0.000000
5/16/2010	11:16:11 AM	BCl3 MFC set to  0.000000
5/16/2010	11:16:11 AM	SiCl4 MFC set to  0.000000
5/16/2010	11:16:11 AM	Bypass solenoid MFC set to  0.000000
5/16/2010	11:16:11 AM	Tube furnace set to 0
5/16/2010	11:16:26 AM	Helium valve closed
5/16/2010	11:16:26 AM	H2 valve closed
5/16/2010	11:16:26 AM	BCl3 valve closed
5/16/2010	11:16:26 AM	PH3 valve closed
5/16/2010	11:16:26 AM	SiCl4 pre valve closed
5/16/2010	11:16:26 AM	SiCl4 post valve closed
5/16/2010	11:16:26 AM	Main Vac valve closed
5/16/2010	11:16:26 AM	Bubbler valve closed
5/16/2010	11:16:26 AM	Bypass valve opened
5/16/2010	11:16:26 AM	Helium MFC set to  0.000000
5/16/2010	11:16:26 AM	H2 MFC set to  0.000000
5/16/2010	11:16:26 AM	BCl3 MFC set to  0.000000
5/16/2010	11:16:26 AM	SiCl4 MFC set to  0.000000
5/16/2010	11:16:26 AM	Bypass solenoid MFC set to  0.000000
5/16/2010	11:16:26 AM	Tube furnace set to 0
5/16/2010	11:16:58 AM	Helium valve closed
5/16/2010	11:16:58 AM	H2 valve closed
5/16/2010	11:16:58 AM	BCl3 valve closed
5/16/2010	11:16:58 AM	PH3 valve closed
5/16/2010	11:16:58 AM	SiCl4 pre valve closed
5/16/2010	11:16:58 AM	SiCl4 post valve closed
5/16/2010	11:16:58 AM	Bubbler valve closed
5/16/2010	11:16:58 AM	Main Vac valve opened
5/16/2010	11:16:58 AM	Bypass valve opened
5/16/2010	11:16:58 AM	Helium MFC set to  0.000000
5/16/2010	11:16:58 AM	H2 MFC set to  0.000000
5/16/2010	11:16:58 AM	BCl3 MFC set to  0.000000
5/16/2010	11:16:58 AM	SiCl4 MFC set to  0.000000
5/16/2010	11:16:58 AM	Bypass solenoid MFC set to  0.000000
5/16/2010	11:16:58 AM	Tube furnace set to 0
5/16/2010	11:21:58 AM	H2 valve closed
5/16/2010	11:21:58 AM	BCl3 valve closed
5/16/2010	11:21:58 AM	PH3 valve closed
5/16/2010	11:21:58 AM	SiCl4 pre valve closed
5/16/2010	11:21:58 AM	SiCl4 post valve closed
5/16/2010	11:21:58 AM	Main Vac valve closed
5/16/2010	11:21:58 AM	Bypass valve closed
5/16/2010	11:21:58 AM	Bubbler valve closed
5/16/2010	11:21:58 AM	Helium valve opened
5/16/2010	11:21:58 AM	Helium MFC set to  500.000000
5/16/2010	11:21:58 AM	H2 MFC set to  0.000000
5/16/2010	11:21:58 AM	BCl3 MFC set to  0.000000
5/16/2010	11:21:58 AM	SiCl4 MFC set to  0.000000
5/16/2010	11:21:58 AM	Bypass solenoid MFC set to  0.000000
5/16/2010	11:21:58 AM	Tube furnace set to 0
5/16/2010	11:23:18 AM	Helium valve closed
5/16/2010	11:23:18 AM	H2 valve closed
5/16/2010	11:23:18 AM	BCl3 valve closed
5/16/2010	11:23:18 AM	PH3 valve closed
5/16/2010	11:23:18 AM	SiCl4 pre valve closed
5/16/2010	11:23:18 AM	SiCl4 post valve closed
5/16/2010	11:23:18 AM	Main Vac valve closed
5/16/2010	11:23:18 AM	Bypass valve closed
5/16/2010	11:23:18 AM	Bubbler valve closed
5/16/2010	11:23:18 AM	Helium MFC set to  0.000000
5/16/2010	11:23:18 AM	H2 MFC set to  0.000000
5/16/2010	11:23:18 AM	BCl3 MFC set to  0.000000
5/16/2010	11:23:18 AM	SiCl4 MFC set to  0.000000
5/16/2010	11:23:18 AM	Bypass solenoid MFC set to  0.000000
5/16/2010	11:23:18 AM	Tube furnace set to 0
5/16/2010	11:23:33 AM	Helium valve closed
5/16/2010	11:23:33 AM	H2 valve closed
5/16/2010	11:23:33 AM	BCl3 valve closed
5/16/2010	11:23:33 AM	PH3 valve closed
5/16/2010	11:23:33 AM	SiCl4 pre valve closed
5/16/2010	11:23:33 AM	SiCl4 post valve closed
5/16/2010	11:23:33 AM	Main Vac valve closed
5/16/2010	11:23:33 AM	Bubbler valve closed
5/16/2010	11:23:33 AM	Bypass valve opened
5/16/2010	11:23:33 AM	Helium MFC set to  0.000000
5/16/2010	11:23:33 AM	H2 MFC set to  0.000000
5/16/2010	11:23:33 AM	BCl3 MFC set to  0.000000
5/16/2010	11:23:33 AM	SiCl4 MFC set to  0.000000
5/16/2010	11:23:33 AM	Bypass solenoid MFC set to  0.000000
5/16/2010	11:23:33 AM	Tube furnace set to 0
5/16/2010	11:24:05 AM	Helium valve closed
5/16/2010	11:24:05 AM	H2 valve closed
5/16/2010	11:24:05 AM	BCl3 valve closed
5/16/2010	11:24:05 AM	PH3 valve closed
5/16/2010	11:24:05 AM	SiCl4 pre valve closed
5/16/2010	11:24:05 AM	SiCl4 post valve closed
5/16/2010	11:24:05 AM	Bubbler valve closed
5/16/2010	11:24:05 AM	Main Vac valve opened
5/16/2010	11:24:05 AM	Bypass valve opened
5/16/2010	11:24:05 AM	Helium MFC set to  0.000000
5/16/2010	11:24:05 AM	H2 MFC set to  0.000000
5/16/2010	11:24:05 AM	BCl3 MFC set to  0.000000
5/16/2010	11:24:05 AM	SiCl4 MFC set to  0.000000
5/16/2010	11:24:05 AM	Bypass solenoid MFC set to  0.000000
5/16/2010	11:24:05 AM	Tube furnace set to 0
5/16/2010	11:29:05 AM	Helium valve closed
5/16/2010	11:29:05 AM	H2 valve closed
5/16/2010	11:29:05 AM	BCl3 valve closed
5/16/2010	11:29:05 AM	PH3 valve closed
5/16/2010	11:29:05 AM	SiCl4 pre valve closed
5/16/2010	11:29:05 AM	SiCl4 post valve closed
5/16/2010	11:29:05 AM	Bubbler valve closed
5/16/2010	11:29:05 AM	Main Vac valve opened
5/16/2010	11:29:05 AM	Bypass valve opened
5/16/2010	11:29:05 AM	Helium MFC set to  0.000000
5/16/2010	11:29:05 AM	H2 MFC set to  0.000000
5/16/2010	11:29:05 AM	BCl3 MFC set to  0.000000
5/16/2010	11:29:05 AM	SiCl4 MFC set to  0.000000
5/16/2010	11:29:05 AM	Bypass solenoid MFC set to  0.000000
5/16/2010	11:29:05 AM	Tube furnace set to 0
5/16/2010	11:29:06 AM	Run finished at 11:29 AM
5/16/2010	11:29:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/16/2010	11:42:08 AM	Recipe started at 11:42 AM
5/16/2010	11:42:08 AM	Helium valve closed
5/16/2010	11:42:08 AM	BCl3 valve closed
5/16/2010	11:42:08 AM	PH3 valve closed
5/16/2010	11:42:08 AM	SiCl4 pre valve closed
5/16/2010	11:42:08 AM	SiCl4 post valve closed
5/16/2010	11:42:08 AM	Main Vac valve closed
5/16/2010	11:42:08 AM	Bypass valve closed
5/16/2010	11:42:08 AM	Bubbler valve closed
5/16/2010	11:42:08 AM	H2 valve opened
5/16/2010	11:42:08 AM	Helium MFC set to  0.000000
5/16/2010	11:42:08 AM	H2 MFC set to  500.000000
5/16/2010	11:42:08 AM	BCl3 MFC set to  0.000000
5/16/2010	11:42:08 AM	SiCl4 MFC set to  0.000000
5/16/2010	11:42:08 AM	Bypass solenoid MFC set to  0.000000
5/16/2010	11:42:08 AM	Tube furnace set to 0
5/16/2010	11:43:28 AM	Helium valve closed
5/16/2010	11:43:28 AM	BCl3 valve closed
5/16/2010	11:43:28 AM	PH3 valve closed
5/16/2010	11:43:28 AM	SiCl4 pre valve closed
5/16/2010	11:43:28 AM	SiCl4 post valve closed
5/16/2010	11:43:28 AM	Main Vac valve closed
5/16/2010	11:43:28 AM	Bypass valve closed
5/16/2010	11:43:28 AM	H2 valve opened
5/16/2010	11:43:28 AM	Bubbler valve opened
5/16/2010	11:43:28 AM	Helium MFC set to  0.000000
5/16/2010	11:43:28 AM	H2 MFC set to  500.000000
5/16/2010	11:43:28 AM	BCl3 MFC set to  0.000000
5/16/2010	11:43:28 AM	SiCl4 MFC set to  0.000000
5/16/2010	11:43:28 AM	Bypass solenoid MFC set to  0.000000
5/16/2010	11:43:28 AM	Tube furnace set to 1000
5/16/2010	12:03:28 PM	Helium valve closed
5/16/2010	12:03:28 PM	PH3 valve closed
5/16/2010	12:03:28 PM	Main Vac valve closed
5/16/2010	12:03:28 PM	Bypass valve closed
5/16/2010	12:03:28 PM	H2 valve opened
5/16/2010	12:03:28 PM	BCl3 valve opened
5/16/2010	12:03:28 PM	SiCl4 pre valve opened
5/16/2010	12:03:28 PM	SiCl4 post valve opened
5/16/2010	12:03:28 PM	Bubbler valve opened
5/16/2010	12:03:28 PM	Helium MFC set to  0.000000
5/16/2010	12:03:28 PM	H2 MFC set to  500.000000
5/16/2010	12:03:28 PM	BCl3 MFC set to  35.000000
5/16/2010	12:03:28 PM	SiCl4 MFC set to  350.000000
5/16/2010	12:03:28 PM	Bypass solenoid MFC set to  0.000000
5/16/2010	12:03:28 PM	Tube furnace set to 1000
5/16/2010	12:18:28 PM	H2 valve closed
5/16/2010	12:18:28 PM	BCl3 valve closed
5/16/2010	12:18:28 PM	PH3 valve closed
5/16/2010	12:18:28 PM	SiCl4 pre valve closed
5/16/2010	12:18:28 PM	SiCl4 post valve closed
5/16/2010	12:18:28 PM	Main Vac valve closed
5/16/2010	12:18:28 PM	Bypass valve closed
5/16/2010	12:18:28 PM	Helium valve opened
5/16/2010	12:18:28 PM	Bubbler valve opened
5/16/2010	12:18:28 PM	Helium MFC set to  500.000000
5/16/2010	12:18:28 PM	H2 MFC set to  0.000000
5/16/2010	12:18:28 PM	BCl3 MFC set to  0.000000
5/16/2010	12:18:28 PM	SiCl4 MFC set to  0.000000
5/16/2010	12:18:28 PM	Bypass solenoid MFC set to  0.000000
5/16/2010	12:18:28 PM	Tube furnace set to 0
5/16/2010	12:38:28 PM	Helium valve closed
5/16/2010	12:38:28 PM	H2 valve closed
5/16/2010	12:38:28 PM	BCl3 valve closed
5/16/2010	12:38:28 PM	PH3 valve closed
5/16/2010	12:38:28 PM	SiCl4 pre valve closed
5/16/2010	12:38:28 PM	SiCl4 post valve closed
5/16/2010	12:38:28 PM	Main Vac valve closed
5/16/2010	12:38:28 PM	Bypass valve closed
5/16/2010	12:38:28 PM	Bubbler valve closed
5/16/2010	12:38:28 PM	Helium MFC set to  0.000000
5/16/2010	12:38:28 PM	H2 MFC set to  0.000000
5/16/2010	12:38:28 PM	BCl3 MFC set to  0.000000
5/16/2010	12:38:28 PM	SiCl4 MFC set to  0.000000
5/16/2010	12:38:28 PM	Bypass solenoid MFC set to  0.000000
5/16/2010	12:38:29 PM	Tube furnace set to 0
5/16/2010	12:38:29 PM	Run finished at 12:38 PM
5/16/2010	12:53:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/16/2010	12:53:33 PM	Recipe started at 12:53 PM
5/16/2010	12:53:33 PM	H2 valve closed
5/16/2010	12:53:33 PM	BCl3 valve closed
5/16/2010	12:53:33 PM	PH3 valve closed
5/16/2010	12:53:33 PM	SiCl4 pre valve closed
5/16/2010	12:53:33 PM	SiCl4 post valve closed
5/16/2010	12:53:33 PM	Main Vac valve closed
5/16/2010	12:53:33 PM	Bypass valve closed
5/16/2010	12:53:33 PM	Bubbler valve closed
5/16/2010	12:53:33 PM	Helium valve opened
5/16/2010	12:53:33 PM	Helium MFC set to  500.000000
5/16/2010	12:53:33 PM	H2 MFC set to  0.000000
5/16/2010	12:53:33 PM	BCl3 MFC set to  0.000000
5/16/2010	12:53:33 PM	SiCl4 MFC set to  0.000000
5/16/2010	12:53:33 PM	Bypass solenoid MFC set to  0.000000
5/16/2010	12:53:33 PM	Tube furnace set to 0
5/16/2010	12:53:39 PM	Helium valve closed
5/16/2010	12:53:39 PM	H2 valve closed
5/16/2010	12:53:39 PM	BCl3 valve closed
5/16/2010	12:53:39 PM	PH3 valve closed
5/16/2010	12:53:39 PM	SiCl4 pre valve closed
5/16/2010	12:53:39 PM	SiCl4 post valve closed
5/16/2010	12:53:39 PM	Main Vac valve closed
5/16/2010	12:53:39 PM	Bypass valve closed
5/16/2010	12:53:39 PM	Bubbler valve closed
5/16/2010	12:53:39 PM	Helium MFC set to  0.000000
5/16/2010	12:53:39 PM	H2 MFC set to  0.000000
5/16/2010	12:53:39 PM	BCl3 MFC set to  0.000000
5/16/2010	12:53:39 PM	SiCl4 MFC set to  0.000000
5/16/2010	12:53:39 PM	Bypass solenoid MFC set to  0.000000
5/16/2010	12:53:39 PM	Tube furnace set to 0
5/16/2010	12:53:39 PM	Run finished at 12:53 PM
5/16/2010	12:53:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/16/2010	1:06:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/16/2010	1:06:42 PM	Recipe started at 1:06 PM
5/16/2010	1:06:42 PM	Helium valve closed
5/16/2010	1:06:42 PM	H2 valve closed
5/16/2010	1:06:42 PM	BCl3 valve closed
5/16/2010	1:06:42 PM	PH3 valve closed
5/16/2010	1:06:42 PM	SiCl4 pre valve closed
5/16/2010	1:06:42 PM	SiCl4 post valve closed
5/16/2010	1:06:42 PM	Main Vac valve closed
5/16/2010	1:06:42 PM	Bubbler valve closed
5/16/2010	1:06:42 PM	Bypass valve opened
5/16/2010	1:06:42 PM	Helium MFC set to  0.000000
5/16/2010	1:06:42 PM	H2 MFC set to  0.000000
5/16/2010	1:06:42 PM	BCl3 MFC set to  0.000000
5/16/2010	1:06:42 PM	SiCl4 MFC set to  0.000000
5/16/2010	1:06:42 PM	Bypass solenoid MFC set to  0.000000
5/16/2010	1:06:42 PM	Tube furnace set to 0
5/16/2010	1:07:30 PM	Helium valve closed
5/16/2010	1:07:30 PM	H2 valve closed
5/16/2010	1:07:30 PM	BCl3 valve closed
5/16/2010	1:07:30 PM	PH3 valve closed
5/16/2010	1:07:30 PM	SiCl4 pre valve closed
5/16/2010	1:07:30 PM	SiCl4 post valve closed
5/16/2010	1:07:30 PM	Bubbler valve closed
5/16/2010	1:07:30 PM	Main Vac valve opened
5/16/2010	1:07:30 PM	Bypass valve opened
5/16/2010	1:07:30 PM	Helium MFC set to  0.000000
5/16/2010	1:07:30 PM	H2 MFC set to  0.000000
5/16/2010	1:07:30 PM	BCl3 MFC set to  0.000000
5/16/2010	1:07:30 PM	SiCl4 MFC set to  0.000000
5/16/2010	1:07:30 PM	Bypass solenoid MFC set to  0.000000
5/16/2010	1:07:30 PM	Tube furnace set to 0
5/16/2010	1:07:30 PM	Run finished at 1:07 PM
5/16/2010	1:07:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/16/2010	1:09:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/16/2010	1:09:37 PM	Recipe started at 1:09 PM
5/16/2010	1:09:37 PM	H2 valve closed
5/16/2010	1:09:37 PM	BCl3 valve closed
5/16/2010	1:09:37 PM	PH3 valve closed
5/16/2010	1:09:37 PM	SiCl4 pre valve closed
5/16/2010	1:09:37 PM	SiCl4 post valve closed
5/16/2010	1:09:37 PM	Main Vac valve closed
5/16/2010	1:09:37 PM	Bypass valve closed
5/16/2010	1:09:37 PM	Bubbler valve closed
5/16/2010	1:09:37 PM	Helium valve opened
5/16/2010	1:09:37 PM	Helium MFC set to  500.000000
5/16/2010	1:09:37 PM	H2 MFC set to  0.000000
5/16/2010	1:09:37 PM	BCl3 MFC set to  0.000000
5/16/2010	1:09:37 PM	SiCl4 MFC set to  0.000000
5/16/2010	1:09:37 PM	Bypass solenoid MFC set to  0.000000
5/16/2010	1:09:37 PM	Tube furnace set to 0
5/16/2010	1:10:57 PM	Helium valve closed
5/16/2010	1:10:57 PM	H2 valve closed
5/16/2010	1:10:57 PM	BCl3 valve closed
5/16/2010	1:10:57 PM	PH3 valve closed
5/16/2010	1:10:57 PM	SiCl4 pre valve closed
5/16/2010	1:10:57 PM	SiCl4 post valve closed
5/16/2010	1:10:57 PM	Main Vac valve closed
5/16/2010	1:10:57 PM	Bypass valve closed
5/16/2010	1:10:57 PM	Bubbler valve closed
5/16/2010	1:10:57 PM	Helium MFC set to  0.000000
5/16/2010	1:10:57 PM	H2 MFC set to  0.000000
5/16/2010	1:10:57 PM	BCl3 MFC set to  0.000000
5/16/2010	1:10:57 PM	SiCl4 MFC set to  0.000000
5/16/2010	1:10:57 PM	Bypass solenoid MFC set to  0.000000
5/16/2010	1:10:57 PM	Tube furnace set to 0
5/16/2010	1:11:12 PM	Helium valve closed
5/16/2010	1:11:12 PM	H2 valve closed
5/16/2010	1:11:12 PM	BCl3 valve closed
5/16/2010	1:11:12 PM	PH3 valve closed
5/16/2010	1:11:12 PM	SiCl4 pre valve closed
5/16/2010	1:11:12 PM	SiCl4 post valve closed
5/16/2010	1:11:12 PM	Main Vac valve closed
5/16/2010	1:11:12 PM	Bubbler valve closed
5/16/2010	1:11:12 PM	Bypass valve opened
5/16/2010	1:11:12 PM	Helium MFC set to  0.000000
5/16/2010	1:11:12 PM	H2 MFC set to  0.000000
5/16/2010	1:11:12 PM	BCl3 MFC set to  0.000000
5/16/2010	1:11:12 PM	SiCl4 MFC set to  0.000000
5/16/2010	1:11:12 PM	Bypass solenoid MFC set to  0.000000
5/16/2010	1:11:12 PM	Tube furnace set to 0
5/16/2010	1:11:44 PM	Helium valve closed
5/16/2010	1:11:44 PM	H2 valve closed
5/16/2010	1:11:44 PM	BCl3 valve closed
5/16/2010	1:11:44 PM	PH3 valve closed
5/16/2010	1:11:44 PM	SiCl4 pre valve closed
5/16/2010	1:11:44 PM	SiCl4 post valve closed
5/16/2010	1:11:44 PM	Bubbler valve closed
5/16/2010	1:11:44 PM	Main Vac valve opened
5/16/2010	1:11:44 PM	Bypass valve opened
5/16/2010	1:11:44 PM	Helium MFC set to  0.000000
5/16/2010	1:11:44 PM	H2 MFC set to  0.000000
5/16/2010	1:11:44 PM	BCl3 MFC set to  0.000000
5/16/2010	1:11:44 PM	SiCl4 MFC set to  0.000000
5/16/2010	1:11:44 PM	Bypass solenoid MFC set to  0.000000
5/16/2010	1:11:44 PM	Tube furnace set to 0
5/16/2010	1:16:44 PM	H2 valve closed
5/16/2010	1:16:44 PM	BCl3 valve closed
5/16/2010	1:16:44 PM	PH3 valve closed
5/16/2010	1:16:44 PM	SiCl4 pre valve closed
5/16/2010	1:16:44 PM	SiCl4 post valve closed
5/16/2010	1:16:44 PM	Main Vac valve closed
5/16/2010	1:16:44 PM	Bypass valve closed
5/16/2010	1:16:44 PM	Bubbler valve closed
5/16/2010	1:16:44 PM	Helium valve opened
5/16/2010	1:16:44 PM	Helium MFC set to  500.000000
5/16/2010	1:16:44 PM	H2 MFC set to  0.000000
5/16/2010	1:16:44 PM	BCl3 MFC set to  0.000000
5/16/2010	1:16:44 PM	SiCl4 MFC set to  0.000000
5/16/2010	1:16:44 PM	Bypass solenoid MFC set to  0.000000
5/16/2010	1:16:45 PM	Tube furnace set to 0
5/16/2010	1:18:04 PM	Helium valve closed
5/16/2010	1:18:04 PM	H2 valve closed
5/16/2010	1:18:04 PM	BCl3 valve closed
5/16/2010	1:18:04 PM	PH3 valve closed
5/16/2010	1:18:04 PM	SiCl4 pre valve closed
5/16/2010	1:18:04 PM	SiCl4 post valve closed
5/16/2010	1:18:04 PM	Main Vac valve closed
5/16/2010	1:18:04 PM	Bypass valve closed
5/16/2010	1:18:04 PM	Bubbler valve closed
5/16/2010	1:18:04 PM	Helium MFC set to  0.000000
5/16/2010	1:18:04 PM	H2 MFC set to  0.000000
5/16/2010	1:18:04 PM	BCl3 MFC set to  0.000000
5/16/2010	1:18:04 PM	SiCl4 MFC set to  0.000000
5/16/2010	1:18:04 PM	Bypass solenoid MFC set to  0.000000
5/16/2010	1:18:04 PM	Tube furnace set to 0
5/16/2010	1:18:19 PM	Helium valve closed
5/16/2010	1:18:19 PM	H2 valve closed
5/16/2010	1:18:19 PM	BCl3 valve closed
5/16/2010	1:18:19 PM	PH3 valve closed
5/16/2010	1:18:19 PM	SiCl4 pre valve closed
5/16/2010	1:18:19 PM	SiCl4 post valve closed
5/16/2010	1:18:19 PM	Main Vac valve closed
5/16/2010	1:18:19 PM	Bubbler valve closed
5/16/2010	1:18:19 PM	Bypass valve opened
5/16/2010	1:18:19 PM	Helium MFC set to  0.000000
5/16/2010	1:18:19 PM	H2 MFC set to  0.000000
5/16/2010	1:18:19 PM	BCl3 MFC set to  0.000000
5/16/2010	1:18:19 PM	SiCl4 MFC set to  0.000000
5/16/2010	1:18:19 PM	Bypass solenoid MFC set to  0.000000
5/16/2010	1:18:19 PM	Tube furnace set to 0
5/16/2010	1:18:51 PM	Helium valve closed
5/16/2010	1:18:51 PM	H2 valve closed
5/16/2010	1:18:51 PM	BCl3 valve closed
5/16/2010	1:18:51 PM	PH3 valve closed
5/16/2010	1:18:51 PM	SiCl4 pre valve closed
5/16/2010	1:18:51 PM	SiCl4 post valve closed
5/16/2010	1:18:51 PM	Bubbler valve closed
5/16/2010	1:18:51 PM	Main Vac valve opened
5/16/2010	1:18:51 PM	Bypass valve opened
5/16/2010	1:18:51 PM	Helium MFC set to  0.000000
5/16/2010	1:18:51 PM	H2 MFC set to  0.000000
5/16/2010	1:18:51 PM	BCl3 MFC set to  0.000000
5/16/2010	1:18:51 PM	SiCl4 MFC set to  0.000000
5/16/2010	1:18:51 PM	Bypass solenoid MFC set to  0.000000
5/16/2010	1:18:51 PM	Tube furnace set to 0
5/16/2010	1:23:51 PM	H2 valve closed
5/16/2010	1:23:51 PM	BCl3 valve closed
5/16/2010	1:23:51 PM	PH3 valve closed
5/16/2010	1:23:51 PM	SiCl4 pre valve closed
5/16/2010	1:23:51 PM	SiCl4 post valve closed
5/16/2010	1:23:51 PM	Main Vac valve closed
5/16/2010	1:23:51 PM	Bypass valve closed
5/16/2010	1:23:51 PM	Bubbler valve closed
5/16/2010	1:23:51 PM	Helium valve opened
5/16/2010	1:23:51 PM	Helium MFC set to  500.000000
5/16/2010	1:23:51 PM	H2 MFC set to  0.000000
5/16/2010	1:23:51 PM	BCl3 MFC set to  0.000000
5/16/2010	1:23:51 PM	SiCl4 MFC set to  0.000000
5/16/2010	1:23:51 PM	Bypass solenoid MFC set to  0.000000
5/16/2010	1:23:51 PM	Tube furnace set to 0
5/16/2010	1:25:10 PM	Helium valve closed
5/16/2010	1:25:10 PM	H2 valve closed
5/16/2010	1:25:10 PM	BCl3 valve closed
5/16/2010	1:25:10 PM	PH3 valve closed
5/16/2010	1:25:10 PM	SiCl4 pre valve closed
5/16/2010	1:25:10 PM	SiCl4 post valve closed
5/16/2010	1:25:10 PM	Main Vac valve closed
5/16/2010	1:25:10 PM	Bypass valve closed
5/16/2010	1:25:10 PM	Bubbler valve closed
5/16/2010	1:25:10 PM	Helium MFC set to  0.000000
5/16/2010	1:25:10 PM	H2 MFC set to  0.000000
5/16/2010	1:25:10 PM	BCl3 MFC set to  0.000000
5/16/2010	1:25:10 PM	SiCl4 MFC set to  0.000000
5/16/2010	1:25:10 PM	Bypass solenoid MFC set to  0.000000
5/16/2010	1:25:10 PM	Tube furnace set to 0
5/16/2010	1:25:25 PM	Helium valve closed
5/16/2010	1:25:25 PM	H2 valve closed
5/16/2010	1:25:25 PM	BCl3 valve closed
5/16/2010	1:25:25 PM	PH3 valve closed
5/16/2010	1:25:25 PM	SiCl4 pre valve closed
5/16/2010	1:25:25 PM	SiCl4 post valve closed
5/16/2010	1:25:25 PM	Main Vac valve closed
5/16/2010	1:25:25 PM	Bubbler valve closed
5/16/2010	1:25:25 PM	Bypass valve opened
5/16/2010	1:25:25 PM	Helium MFC set to  0.000000
5/16/2010	1:25:25 PM	H2 MFC set to  0.000000
5/16/2010	1:25:25 PM	BCl3 MFC set to  0.000000
5/16/2010	1:25:25 PM	SiCl4 MFC set to  0.000000
5/16/2010	1:25:25 PM	Bypass solenoid MFC set to  0.000000
5/16/2010	1:25:25 PM	Tube furnace set to 0
5/16/2010	1:25:56 PM	Helium valve closed
5/16/2010	1:25:56 PM	H2 valve closed
5/16/2010	1:25:56 PM	BCl3 valve closed
5/16/2010	1:25:56 PM	PH3 valve closed
5/16/2010	1:25:56 PM	SiCl4 pre valve closed
5/16/2010	1:25:56 PM	SiCl4 post valve closed
5/16/2010	1:25:56 PM	Bubbler valve closed
5/16/2010	1:25:56 PM	Main Vac valve opened
5/16/2010	1:25:56 PM	Bypass valve opened
5/16/2010	1:25:56 PM	Helium MFC set to  0.000000
5/16/2010	1:25:56 PM	H2 MFC set to  0.000000
5/16/2010	1:25:56 PM	BCl3 MFC set to  0.000000
5/16/2010	1:25:56 PM	SiCl4 MFC set to  0.000000
5/16/2010	1:25:56 PM	Bypass solenoid MFC set to  0.000000
5/16/2010	1:25:56 PM	Tube furnace set to 0
5/16/2010	1:30:57 PM	Helium valve closed
5/16/2010	1:30:57 PM	H2 valve closed
5/16/2010	1:30:57 PM	BCl3 valve closed
5/16/2010	1:30:57 PM	PH3 valve closed
5/16/2010	1:30:57 PM	SiCl4 pre valve closed
5/16/2010	1:30:57 PM	SiCl4 post valve closed
5/16/2010	1:30:57 PM	Bubbler valve closed
5/16/2010	1:30:57 PM	Main Vac valve opened
5/16/2010	1:30:57 PM	Bypass valve opened
5/16/2010	1:30:57 PM	Helium MFC set to  0.000000
5/16/2010	1:30:57 PM	H2 MFC set to  0.000000
5/16/2010	1:30:57 PM	BCl3 MFC set to  0.000000
5/16/2010	1:30:57 PM	SiCl4 MFC set to  0.000000
5/16/2010	1:30:57 PM	Bypass solenoid MFC set to  0.000000
5/16/2010	1:30:57 PM	Tube furnace set to 0
5/16/2010	1:30:58 PM	Run finished at 1:30 PM
5/16/2010	1:30:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/16/2010	1:32:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/16/2010	1:32:01 PM	Recipe started at 1:32 PM
5/16/2010	1:32:01 PM	Helium valve closed
5/16/2010	1:32:01 PM	H2 valve closed
5/16/2010	1:32:01 PM	BCl3 valve closed
5/16/2010	1:32:01 PM	PH3 valve closed
5/16/2010	1:32:01 PM	SiCl4 pre valve closed
5/16/2010	1:32:01 PM	SiCl4 post valve closed
5/16/2010	1:32:01 PM	Main Vac valve closed
5/16/2010	1:32:01 PM	Bypass valve closed
5/16/2010	1:32:01 PM	Bubbler valve closed
5/16/2010	1:32:01 PM	Helium MFC set to  0.000000
5/16/2010	1:32:01 PM	H2 MFC set to  0.000000
5/16/2010	1:32:01 PM	BCl3 MFC set to  0.000000
5/16/2010	1:32:01 PM	SiCl4 MFC set to  0.000000
5/16/2010	1:32:01 PM	Bypass solenoid MFC set to  0.000000
5/16/2010	1:32:01 PM	Tube furnace set to 0
5/16/2010	1:32:01 PM	Run finished at 1:32 PM
5/16/2010	1:32:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
5/16/2010	1:32:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/16/2010	1:32:16 PM	Recipe started at 1:32 PM
5/16/2010	1:32:16 PM	Helium valve closed
5/16/2010	1:32:16 PM	H2 valve closed
5/16/2010	1:32:16 PM	BCl3 valve closed
5/16/2010	1:32:16 PM	PH3 valve closed
5/16/2010	1:32:16 PM	SiCl4 pre valve closed
5/16/2010	1:32:16 PM	SiCl4 post valve closed
5/16/2010	1:32:16 PM	Main Vac valve closed
5/16/2010	1:32:16 PM	Bubbler valve closed
5/16/2010	1:32:16 PM	Bypass valve opened
5/16/2010	1:32:16 PM	Helium MFC set to  0.000000
5/16/2010	1:32:16 PM	H2 MFC set to  0.000000
5/16/2010	1:32:16 PM	BCl3 MFC set to  0.000000
5/16/2010	1:32:16 PM	SiCl4 MFC set to  0.000000
5/16/2010	1:32:16 PM	Bypass solenoid MFC set to  0.000000
5/16/2010	1:32:16 PM	Tube furnace set to 0
5/16/2010	1:32:16 PM	Helium valve closed
5/16/2010	1:32:16 PM	H2 valve closed
5/16/2010	1:32:16 PM	BCl3 valve closed
5/16/2010	1:32:16 PM	PH3 valve closed
5/16/2010	1:32:16 PM	SiCl4 pre valve closed
5/16/2010	1:32:16 PM	SiCl4 post valve closed
5/16/2010	1:32:16 PM	Bubbler valve closed
5/16/2010	1:32:16 PM	Main Vac valve opened
5/16/2010	1:32:16 PM	Bypass valve opened
5/16/2010	1:32:16 PM	Helium MFC set to  0.000000
5/16/2010	1:32:16 PM	H2 MFC set to  0.000000
5/16/2010	1:32:16 PM	BCl3 MFC set to  0.000000
5/16/2010	1:32:16 PM	SiCl4 MFC set to  0.000000
5/16/2010	1:32:16 PM	Bypass solenoid MFC set to  0.000000
5/16/2010	1:32:16 PM	Tube furnace set to 0
5/16/2010	1:32:16 PM	Run finished at 1:32 PM
5/16/2010	1:32:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/16/2010	1:33:45 PM	Recipe started at 1:33 PM
5/16/2010	1:33:45 PM	Helium valve closed
5/16/2010	1:33:45 PM	BCl3 valve closed
5/16/2010	1:33:45 PM	PH3 valve closed
5/16/2010	1:33:45 PM	SiCl4 pre valve closed
5/16/2010	1:33:45 PM	SiCl4 post valve closed
5/16/2010	1:33:45 PM	Main Vac valve closed
5/16/2010	1:33:45 PM	Bypass valve closed
5/16/2010	1:33:45 PM	Bubbler valve closed
5/16/2010	1:33:45 PM	H2 valve opened
5/16/2010	1:33:45 PM	Helium MFC set to  0.000000
5/16/2010	1:33:45 PM	H2 MFC set to  500.000000
5/16/2010	1:33:45 PM	BCl3 MFC set to  0.000000
5/16/2010	1:33:45 PM	SiCl4 MFC set to  0.000000
5/16/2010	1:33:45 PM	Bypass solenoid MFC set to  0.000000
5/16/2010	1:33:46 PM	Tube furnace set to 0
5/16/2010	1:35:05 PM	Helium valve closed
5/16/2010	1:35:05 PM	BCl3 valve closed
5/16/2010	1:35:05 PM	PH3 valve closed
5/16/2010	1:35:05 PM	SiCl4 pre valve closed
5/16/2010	1:35:05 PM	SiCl4 post valve closed
5/16/2010	1:35:05 PM	Main Vac valve closed
5/16/2010	1:35:05 PM	Bypass valve closed
5/16/2010	1:35:05 PM	H2 valve opened
5/16/2010	1:35:05 PM	Bubbler valve opened
5/16/2010	1:35:05 PM	Helium MFC set to  0.000000
5/16/2010	1:35:05 PM	H2 MFC set to  500.000000
5/16/2010	1:35:05 PM	BCl3 MFC set to  0.000000
5/16/2010	1:35:05 PM	SiCl4 MFC set to  0.000000
5/16/2010	1:35:05 PM	Bypass solenoid MFC set to  0.000000
5/16/2010	1:35:05 PM	Tube furnace set to 1000
5/16/2010	1:55:05 PM	Helium valve closed
5/16/2010	1:55:05 PM	PH3 valve closed
5/16/2010	1:55:05 PM	Main Vac valve closed
5/16/2010	1:55:05 PM	Bypass valve closed
5/16/2010	1:55:05 PM	H2 valve opened
5/16/2010	1:55:05 PM	BCl3 valve opened
5/16/2010	1:55:05 PM	SiCl4 pre valve opened
5/16/2010	1:55:05 PM	SiCl4 post valve opened
5/16/2010	1:55:05 PM	Bubbler valve opened
5/16/2010	1:55:05 PM	Helium MFC set to  0.000000
5/16/2010	1:55:05 PM	H2 MFC set to  500.000000
5/16/2010	1:55:05 PM	BCl3 MFC set to  35.000000
5/16/2010	1:55:05 PM	SiCl4 MFC set to  350.000000
5/16/2010	1:55:05 PM	Bypass solenoid MFC set to  0.000000
5/16/2010	1:55:05 PM	Tube furnace set to 1000
5/16/2010	2:10:05 PM	H2 valve closed
5/16/2010	2:10:05 PM	BCl3 valve closed
5/16/2010	2:10:05 PM	PH3 valve closed
5/16/2010	2:10:05 PM	SiCl4 pre valve closed
5/16/2010	2:10:05 PM	SiCl4 post valve closed
5/16/2010	2:10:05 PM	Main Vac valve closed
5/16/2010	2:10:05 PM	Bypass valve closed
5/16/2010	2:10:05 PM	Helium valve opened
5/16/2010	2:10:05 PM	Bubbler valve opened
5/16/2010	2:10:05 PM	Helium MFC set to  500.000000
5/16/2010	2:10:05 PM	H2 MFC set to  0.000000
5/16/2010	2:10:05 PM	BCl3 MFC set to  0.000000
5/16/2010	2:10:05 PM	SiCl4 MFC set to  0.000000
5/16/2010	2:10:05 PM	Bypass solenoid MFC set to  0.000000
5/16/2010	2:10:05 PM	Tube furnace set to 0
5/16/2010	2:30:05 PM	Helium valve closed
5/16/2010	2:30:05 PM	H2 valve closed
5/16/2010	2:30:05 PM	BCl3 valve closed
5/16/2010	2:30:05 PM	PH3 valve closed
5/16/2010	2:30:05 PM	SiCl4 pre valve closed
5/16/2010	2:30:05 PM	SiCl4 post valve closed
5/16/2010	2:30:05 PM	Main Vac valve closed
5/16/2010	2:30:05 PM	Bypass valve closed
5/16/2010	2:30:05 PM	Bubbler valve closed
5/16/2010	2:30:05 PM	Helium MFC set to  0.000000
5/16/2010	2:30:05 PM	H2 MFC set to  0.000000
5/16/2010	2:30:05 PM	BCl3 MFC set to  0.000000
5/16/2010	2:30:05 PM	SiCl4 MFC set to  0.000000
5/16/2010	2:30:05 PM	Bypass solenoid MFC set to  0.000000
5/16/2010	2:30:05 PM	Tube furnace set to 0
5/16/2010	2:30:06 PM	Run finished at 2:30 PM
5/16/2010	2:44:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/16/2010	2:44:30 PM	Recipe started at 2:44 PM
5/16/2010	2:44:30 PM	H2 valve closed
5/16/2010	2:44:30 PM	BCl3 valve closed
5/16/2010	2:44:30 PM	PH3 valve closed
5/16/2010	2:44:31 PM	SiCl4 pre valve closed
5/16/2010	2:44:31 PM	SiCl4 post valve closed
5/16/2010	2:44:31 PM	Main Vac valve closed
5/16/2010	2:44:31 PM	Bypass valve closed
5/16/2010	2:44:31 PM	Bubbler valve closed
5/16/2010	2:44:31 PM	Helium valve opened
5/16/2010	2:44:31 PM	Helium MFC set to  500.000000
5/16/2010	2:44:31 PM	H2 MFC set to  0.000000
5/16/2010	2:44:31 PM	BCl3 MFC set to  0.000000
5/16/2010	2:44:31 PM	SiCl4 MFC set to  0.000000
5/16/2010	2:44:31 PM	Bypass solenoid MFC set to  0.000000
5/16/2010	2:44:31 PM	Tube furnace set to 0
5/16/2010	2:44:36 PM	Helium valve closed
5/16/2010	2:44:36 PM	H2 valve closed
5/16/2010	2:44:36 PM	BCl3 valve closed
5/16/2010	2:44:36 PM	PH3 valve closed
5/16/2010	2:44:36 PM	SiCl4 pre valve closed
5/16/2010	2:44:36 PM	SiCl4 post valve closed
5/16/2010	2:44:36 PM	Main Vac valve closed
5/16/2010	2:44:36 PM	Bypass valve closed
5/16/2010	2:44:36 PM	Bubbler valve closed
5/16/2010	2:44:36 PM	Helium MFC set to  0.000000
5/16/2010	2:44:36 PM	H2 MFC set to  0.000000
5/16/2010	2:44:36 PM	BCl3 MFC set to  0.000000
5/16/2010	2:44:36 PM	SiCl4 MFC set to  0.000000
5/16/2010	2:44:36 PM	Bypass solenoid MFC set to  0.000000
5/16/2010	2:44:36 PM	Tube furnace set to 0
5/16/2010	2:44:36 PM	Run finished at 2:44 PM
5/16/2010	2:44:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/16/2010	2:49:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/16/2010	2:49:26 PM	Recipe started at 2:49 PM
5/16/2010	2:49:26 PM	Helium valve closed
5/16/2010	2:49:26 PM	H2 valve closed
5/16/2010	2:49:26 PM	BCl3 valve closed
5/16/2010	2:49:26 PM	PH3 valve closed
5/16/2010	2:49:26 PM	SiCl4 pre valve closed
5/16/2010	2:49:26 PM	SiCl4 post valve closed
5/16/2010	2:49:26 PM	Main Vac valve closed
5/16/2010	2:49:26 PM	Bubbler valve closed
5/16/2010	2:49:26 PM	Bypass valve opened
5/16/2010	2:49:26 PM	Helium MFC set to  0.000000
5/16/2010	2:49:26 PM	H2 MFC set to  0.000000
5/16/2010	2:49:26 PM	BCl3 MFC set to  0.000000
5/16/2010	2:49:26 PM	SiCl4 MFC set to  0.000000
5/16/2010	2:49:26 PM	Bypass solenoid MFC set to  0.000000
5/16/2010	2:49:26 PM	Tube furnace set to 0
5/16/2010	2:50:13 PM	Helium valve closed
5/16/2010	2:50:13 PM	H2 valve closed
5/16/2010	2:50:13 PM	BCl3 valve closed
5/16/2010	2:50:13 PM	PH3 valve closed
5/16/2010	2:50:13 PM	SiCl4 pre valve closed
5/16/2010	2:50:13 PM	SiCl4 post valve closed
5/16/2010	2:50:13 PM	Bubbler valve closed
5/16/2010	2:50:13 PM	Main Vac valve opened
5/16/2010	2:50:13 PM	Bypass valve opened
5/16/2010	2:50:13 PM	Helium MFC set to  0.000000
5/16/2010	2:50:13 PM	H2 MFC set to  0.000000
5/16/2010	2:50:13 PM	BCl3 MFC set to  0.000000
5/16/2010	2:50:13 PM	SiCl4 MFC set to  0.000000
5/16/2010	2:50:13 PM	Bypass solenoid MFC set to  0.000000
5/16/2010	2:50:13 PM	Tube furnace set to 0
5/16/2010	2:50:14 PM	Run finished at 2:50 PM
5/16/2010	2:50:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
